以高性价比颗粒硅带为衬底多晶硅薄膜的二次引铝低温制备法

GIEC OpenIR > 中国科学院广州能源研究所

	以高性价比颗粒硅带为衬底多晶硅薄膜的二次引铝低温制备法
	邱春文; 石旺舟; 王晓晶; 周燕
	2003
Source Publication	人工晶体学报
Volume	32 Issue:4 Pages:361-365
Cooperation Status	其它
Indexed By	EI
Language	中文
Document Type	期刊论文
Identifier	http://ir.giec.ac.cn/handle/344007/623
Collection	中国科学院广州能源研究所
Recommended Citation GB/T 7714	邱春文,石旺舟,王晓晶,等. 以高性价比颗粒硅带为衬底多晶硅薄膜的二次引铝低温制备法[J]. 人工晶体学报,2003,32(4):361-365.
APA	邱春文,石旺舟,王晓晶,&周燕.(2003).以高性价比颗粒硅带为衬底多晶硅薄膜的二次引铝低温制备法.人工晶体学报,32(4),361-365.
MLA	邱春文,et al."以高性价比颗粒硅带为衬底多晶硅薄膜的二次引铝低温制备法".人工晶体学报 32.4(2003):361-365.

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