Knowledge Management System Of Guangzhou Institute of Energy Conversion, CAS
以高性价比颗粒硅带为衬底多晶硅薄膜的二次引铝低温制备法 | |
邱春文; 石旺舟; 王晓晶; 周燕 | |
2003 | |
Source Publication | 人工晶体学报
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Volume | 32Issue:4Pages:361-365 |
Cooperation Status | 其它 |
Indexed By | EI |
Language | 中文 |
Document Type | 期刊论文 |
Identifier | http://ir.giec.ac.cn/handle/344007/623 |
Collection | 中国科学院广州能源研究所 |
Recommended Citation GB/T 7714 | 邱春文,石旺舟,王晓晶,等. 以高性价比颗粒硅带为衬底多晶硅薄膜的二次引铝低温制备法[J]. 人工晶体学报,2003,32(4):361-365. |
APA | 邱春文,石旺舟,王晓晶,&周燕.(2003).以高性价比颗粒硅带为衬底多晶硅薄膜的二次引铝低温制备法.人工晶体学报,32(4),361-365. |
MLA | 邱春文,et al."以高性价比颗粒硅带为衬底多晶硅薄膜的二次引铝低温制备法".人工晶体学报 32.4(2003):361-365. |
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