MEMS热敏微流量传感器研究

GIEC OpenIR > 中国科学院广州能源研究所

	MEMS热敏微流量传感器研究
	刘国华; 张伟; 徐进良
	2008
Source Publication	微细加工技术
Issue	4 Pages:53-57
Cooperation Status	其它
Indexed By	其他
Language	中文
Document Type	期刊论文
Identifier	http://ir.giec.ac.cn/handle/344007/80
Collection	中国科学院广州能源研究所
Recommended Citation GB/T 7714	刘国华,张伟,徐进良. MEMS热敏微流量传感器研究[J]. 微细加工技术,2008(4):53-57.
APA	刘国华,张伟,&徐进良.(2008).MEMS热敏微流量传感器研究.微细加工技术(4),53-57.
MLA	刘国华,et al."MEMS热敏微流量传感器研究".微细加工技术 .4(2008):53-57.

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