Knowledge Management System Of Guangzhou Institute of Energy Conversion, CAS
| 以废弃电子级硅芯片回收高纯硅工艺的研究 | |
| Alternative Title | STUDY ON THE TECHNOLOGY OF RECYCLING HIGH PURITY SILICON MATERIALS FROM WASTE ELECTRONIC GRADE SILICON CHIPS |
| 徐华毕 | |
| Thesis Advisor | 梁宗存 |
| 2007-06-17 | |
| Degree Grantor | 中国科学院广州能源研究所 |
| Place of Conferral | 广州能源研究所 |
| Degree Name | 硕士 |
| Keyword | 太阳能级硅材料 废弃电子级硅芯片 机械喷砂 化学腐蚀 |
| Abstract | 本篇论文针对当前半导体行业留下来的废弃电子级硅芯片进行回收处理，以期有效去除废弃硅芯片表面的金属掺杂层，回收高纯硅料，从而补充供不应求的太阳能级硅料。 在处理过程中，主要采用喷砂和化学腐蚀两种方法。喷砂是利用喷枪将白刚玉均匀地喷到硅片表面，以除去表面金属杂质层，从而回收高纯硅料。化学腐蚀法是利用混合酸溶液将废弃硅芯片表面的金属杂质层腐蚀干净，从而获得纯度较高的硅片。实验证明，通过喷砂和化学腐蚀两种回收处理废弃电子硅芯片的方法都是切实可行的。机械喷砂适宜于样品尺寸比较大的硅片，对于样品尺寸比较小的碎片或者颗粒则适宜于采用化学腐蚀法。为了有效地回收高纯硅材料，可以将两种方法综合加以利用。 |
| Other Abstract | In this thesis we put the emphasis on the reclaiming high purity silicon materials from waste electronic grade silicon chips which is collected from semiconductor industry, so as to meet the demand of solar grade silicon materials to a certain extent. We adopted sand blasting and acid etching in the recovering process of waste silicon chips. On the experiment we removed the impurity layers on the surface of the waster silicon chips and reclaimed the high purity silicon chips by sand-blasting method. In addition, the admixture of HF 、HNO3 and CH3COOH was used to etch the metal-intermingled layers on the surface of the waster silicon chips so that high purity silicon chips were reclaimed. We can identify that the two methods of sand-blasting and acid etching would be available in reclaiming high purity silicon materials from waste electronic grade silicon chips. Sand-blasting is suitable to reclaim silicon chips with large size, and acid-etching is suitable to reclaim silicon chips with small size or silicon grains. Of course, we can use the two methods together to reclaim high purity silicon materials with high efficiency and low cost. |
| Pages | 60 |
| Language | 中文 |
| Document Type | 学位论文 |
| Identifier | http://ir.giec.ac.cn/handle/344007/4043 |
| Collection | 中国科学院广州能源研究所 |
| Recommended Citation GB/T 7714 | 徐华毕. 以废弃电子级硅芯片回收高纯硅工艺的研究[D]. 广州能源研究所. 中国科学院广州能源研究所,2007. |
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